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Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror

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Metadaten
Author:Ulrich Kallmann, Michael Lootze, Ulrich MeschederORCiDGND
DOI:https://doi.org/10.3390/mi12020156
ISSN:2072-666X
Parent Title (English):Micromachines
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2021
Release Date:2021/04/07
Tag:Adaptive optics; Micro-optical electro-mechanical system (MOEMS); Optical simulation; Physical optics; Silicon-on-insulator (SOI)
Volume:12.2021
Issue:2 Artikel 156
Pagenumber:17
Open Access:Frei verf├╝gbar
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International