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Influence of electrochemical operating conditions on the microme-chanical properties of electrodeposited Nickel-Cobalt alloys for fabrication of microtools

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Metadaten
Author:Isman M. KhaziORCiDGND, Ulrich MeschederORCiDGND
URL:https://ieeexplore.ieee.org/document/9012795
ISBN:978-3-8007-5090-0
Parent Title (English):MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin
Publisher:VDE Verlag
Place of publication:Berlin
Document Type:Conference Proceeding
Language:English
Year of Completion:2019
Release Date:2019/10/23
First Page:599
Last Page:602
Open-Access-Status: Closed Access 
Licence (German):License LogoUrheberrechtlich geschützt