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Low-impedance thin-film polycrystalline silicon microelectrodes for extracellular stimulation and recording

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Author:Volker BucherORCiDGND, Michael Graf, Martin Stelzle, Wilfried Nisch
DOI:https://doi.org/10.1016/S0956-5663(99)00037-8
ISSN:0956-5663
Parent Title (English):Biosensors and Bioelectronics
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:1999
Release Date:2017/06/27
Tag:Impedance spectroscopy; Micro electrode arrays; Polycrystalline silicon; Porous silicon; Thin-film microelectrodes
Volume:14.1999
Issue:7
First Page:639
Last Page:649
Open-Access-Status: Closed Access 
Licence (German):License LogoUrheberrechtlich geschützt