Investigation of Long-Term Stability of Hybrid Systems-in-Foil (HySiF) for Biomedical Applications
| Author: | Ulrike Passlack, Nicolai Simon, Volker BucherORCiDGND, Christine Harendt, Thomas Stieglitz, Joachim N. Burghartz |
|---|---|
| DOI: | https://doi.org/10.1109/ESTC48849.2020.9229795 |
| ISBN: | 978-1-7281-6293-5 |
| Parent Title (English): | 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC), 15-18 September 2020, Tonsberg, Vestfold Norway |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2020 |
| Release Date: | 2020/12/07 |
| Tag: | Atomic layer deposition; Polyimides; Silicon; Substrates; Surface treatment |
| Page Number: | 6 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |