Qualification of the Barrier Properties of ALD-coated Polymer Films with Humidity Sensors
| Author: | Nicolai Simon, Ulrike Passlack, Thomas Stieglitz, Felix BlendingerORCiDGND, Volker BucherORCiDGND |
|---|---|
| ISBN: | 978-3-8007-5656-8 |
| Parent Title (English): | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany |
| Publisher: | VDE Verlag |
| Place of publication: | Berlin |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2021 |
| Release Date: | 2021/11/05 |
| First Page: | 380 |
| Last Page: | 383 |
| Licence (German): |  Urheberrechtlich geschützt |