Volltext-Downloads (blau) und Frontdoor-Views (grau)
The search result changed since you submitted your search request. Documents might be displayed in a different sort order.
  • search hit 13 of 18
Back to Result List

Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces

Export metadata

Additional Services

Search Google Scholar

Statistics

frontdoor_oas
Metadaten
Author:Shervin KeshavarziORCiDGND, Ulrich MeschederORCiDGND, Holger Reinecke
DOI:https://doi.org/10.1109/JMEMS.2016.2519823
ISSN:1941-0158
Parent Title (English):Journal of Microelectromechanical Systems
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2016
Release Date:2017/04/26
Tag:Direct bonding; Porous silicon; Velcro principle; van der Waals force
Volume:25.2016
Issue:2
First Page:371
Last Page:379
Open-Access-Status: Open Access 
Licence (German):License LogoUrheberrechtlich geschützt