Silicon Needle-like Surfaces for Room Temperature Silicon-Silicon Bonding Applications
Author: | Shervin KeshavarziORCiDGND |
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URN: | https://urn:nbn:de:bsz:25-freidok-1515955 |
Referee: | Holger Reinecke, Ulrich MeschederORCiDGND |
Document Type: | Doctoral Thesis |
Language: | English |
Year of Completion: | 2019 |
University: | Albert-Ludwigs-Universität |
City of university: | Freiburg |
Date of final exam: | 2019/12/05 |
Release Date: | 2019/12/20 |
Page Number: | 220 |
Open-Access-Status: | Open Access |
Licence (German): | Urheberrechtlich geschützt |