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Sequential Nano-Explosion Using Patterned Porous Silicon

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Metadaten
Author:Shervin KeshavarziORCiD, Frederico Lima, Wolfgang Kronast, Ulrich MeschederORCiDGND
DOI:https://doi.org/10.1109/JMEMS.2018.2797306
ISSN:1057-7157
Parent Title (English):Journal of Microelectromechanical Systems
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2018
Release Date:2018/07/17
Tag:Energetic material; MEMS; Porous silicon
Volume:27.2018
Issue:2
First Page:250
Last Page:258
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG