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Galvanische Prozesse in der Mikrosystemtechnik: Effekte, Kontrolle und Steuerung

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Metadaten
Author:Klaus Bade, Andreas FathGND, Werner Leskopf
ISSN:0026-0797
Parent Title (German):Metalloberfläche: MO
Document Type:Contribution to a Periodical
Language:German
Year of Completion:1999
Release Date:2017/12/07
Volume:53.1999
Issue:9
First Page:34
Last Page:38
Licence (German):License LogoEs gilt das UrhG