Corner rounding of sharp silicon punching tool edges by local oxidation of silicon
| Author: | Ulrich MeschederORCiDGND, Isman M. KhaziORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1016/j.mee.2015.02.033 |
| ISSN: | 0167-9317 |
| Parent Title (English): | Microelectronic Engineering |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2015 |
| Release Date: | 2016/11/15 |
| Tag: | 3D transformation; Bird’s beak; Convex and concave corner rounding; Locos; Micropunching; Silicon punch tool |
| Volume: | 141.2015 |
| Issue: | 2 |
| First Page: | 178 |
| Last Page: | 183 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |