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Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces

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Author:Shervin KeshavarziORCiDGND, Ulrich MeschederORCiDGND, Holger Reinecke
DOI:https://doi.org/10.1109/JMEMS.2016.2519823
ISSN:1941-0158
Parent Title (English):Journal of Microelectromechanical Systems
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2016
Release Date:2017/04/26
Tag:Direct bonding; Porous silicon; Velcro principle; van der Waals force
Volume:25.2016
Issue:2
First Page:371
Last Page:379
Open Access :Frei verfügbar
Licence (German):License LogoEs gilt das UrhG