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Plasmabeschichtung in der Mikrotechnik

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Metadaten
Author:Volker BucherORCiDGND, Diethard Kapp-Schwoerer
ISSN:1614-4538
Parent Title (German):Mikroproduktion
Document Type:Contribution to a Periodical
Language:German
Year of Completion:2008
Release Date:2017/06/26
Issue:5
First Page:24
Last Page:27
Licence (German):License LogoUrheberrechtlich geschützt