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Single and Multilayer Atomic Layer Deposition on and into Mesoporous Silicon Layers

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Metadaten
Author:Andras KovacsORCiD, Dagmar Martin, Alexander FilbertGND, Volker BucherORCiDGND, Ulrich MeschederORCiDGND
DOI:https://doi.org/10.1149/09802.0121ecst
ISSN:1938-6737
Parent Title (English):ECS Transactions
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2020
Release Date:2020/10/15
Volume:98.2020
Issue:2
First Page:121
Last Page:130
Licence (German):License LogoEs gilt das UrhG