• search hit 37 of 67
Back to Result List

Surface Micromachining Process for C-Si as Active Material

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Andras Kovacs, Ulrich MeschederORCiDGND
ISBN:978-3-540-42150-4
Parent Title (English):Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany
Publisher:Springer
Place of publication:Berlin
Document Type:Conference Proceeding
Language:English
Year of Completion:2001
Release Date:2018/02/27
Tag:Porous silicon; Sacrificial layer; Surface micromachining
First Page:620
Last Page:623
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG