Thin Photonic Crystals for Optical Characterization of Ultrathin Hafnium Dioxide in Mesoporous Layers
Author: | Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
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DOI: | https://doi.org/10.1109/ICSENS.2018.8589935 |
ISBN: | 978-1-5386-4707-3 |
Parent Title (English): | IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2018 |
Release Date: | 2019/02/07 |
Tag: | ALD; Hafnium dioxide; Optical spectroscopy; Photonic crystal; Porous silicon; Ultrathin |
Page Number: | 4 |
Open-Access-Status: | Closed Access |
Licence (German): | Urheberrechtlich geschützt |