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Nanoneedles based on porous silicon for chip bonding with self assembly capability

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Metadaten
Author:Prasad Jonnalagadda, Ulrich MeschederORCiDGND, Andras Kovacs, Antwi Nimo
DOI:https://doi.org/10.1002/pssc.201000139
ISSN:1610-1642
Parent Title (English):physica status solidi (c)
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2011
Release Date:2018/01/30
Volume:8.2011
Issue:6: Special Issue: 7th International Conference on Porous Semiconductors – Science and Technology (PSST 2010) • EnFI 2010 Conference – Engineering of Functional Interfaces
First Page:1841
Last Page:1846
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG