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Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters

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Metadaten
Author:Ulrich MeschederORCiDGND, Andras Kovacs, Bernhard Müller
Parent Title (German):Forschungsbericht
Document Type:Report
Opac ID:Im Katalog der Hochschule Furtwangen ansehen
Language:English
Year of Completion:2002
Release Date:2018/09/14
First Page:32
Last Page:35
Open Access:Frei verfügbar
Project report:Forschungsbericht 2002
Licence (German):License LogoEs gilt das UrhG