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3D structuring of c-Si using porous silicon as sacrificial material

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Metadaten
Author:Ulrich MeschederORCiDGND, Andras Kovacs, A. Fahad, Rolf Huster
DOI:https://doi.org/10.1109/NANO.2002.1032117
ISBN:0-7803-7538-6
Parent Title (English):Proceedings of the 2002 2nd IEEE Conference on Nanotechnology: IEEE-NAN0 2002; August 26-28, Washington D.C.
Document Type:Conference Proceeding
Language:English
Year of Completion:2002
Release Date:2018/02/23
First Page:33
Last Page:36
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG