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3D-Mikrostrukturierungsverfahren: von kristallinem Silizium mit lokal einstellbarem Anisotropiefaktor

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Metadaten
Author:Ulrich MeschederORCiDGND, Andras Kovacs
ISSN:1860-0875
Parent Title (German):MikroSystemTechnik
Document Type:Contribution to a Periodical
Language:German
Year of Completion:2005
Release Date:2018/01/24
Issue:3
First Page:7
Last Page:9
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG