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High quality 3D shapes by silicon anodization

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Metadaten
Author:Alexey Ivanov, Andras Kovacs, Ulrich MeschederORCiDGND
DOI:https://doi.org/10.1002/pssa.201000163
ISSN:1862-6319
Parent Title (English):physica status solidi (a)
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2011
Release Date:2018/01/30
Volume:208.2011
Issue:6
First Page:1383
Last Page:1388
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG