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Microfabrication of 3D Free-Forms with Textured Surface Morphology in Monocrystalline Silicon using Grayscale Technology

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Metadaten
Author:Isman M. KhaziORCiDGND, Andras KovacsORCiDGND, Ulrich MeschederORCiDGND
DOI:https://doi.org/10.33140/JAMSER.04.04.04
ISSN:2689-1204
Parent Title (English):Journal of Applied Material Science & Engineering Research
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2020
Release Date:2020/11/19
Tag:3D free-forms; Direct writing laser; Gray scale technology; Grayscale lithography; Reactive ion etching
Volume:4.2020
Issue:4
First Page:150
Last Page:154
Open-Access-Status: Open Access 
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International