Investigation of material removal mechanisms of laser-structured Si3N4 via single diamond grit scratching
| Author: | Masih Paknejad, Bahman AzarhoushangORCiDGND, Ali ZahediORCiDGND, Mehdi Khakrangin, Mohammadali Kadivar |
|---|---|
| DOI: | https://doi.org/10.21203/rs.3.rs-1974605/v1 |
| ISSN: | 2693-5015 |
| Parent Title (English): | Research Square |
| Document Type: | Working Paper |
| Language: | English |
| Year of Completion: | 2022 |
| Release Date: | 2022/10/10 |
| Tag: | Preprint Laser structuring; Material removal mechanism; Online-Ressource; Silicon nitride (Si3N4); Single grit diamond scratching; Ultrashort pulse laser |
| Page Number: | 25 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |