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In situ Prozess-Visualisierung/Optimierung und Anwendung der Atomlagenabscheidung

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Metadaten
Author:Felix BlendingerORCiDGND, Michael Metzger, Daniel Hähnel, Monika Fleischer, Volker BucherORCiDGND
URL:https://www.wotech-technical-media.de/womag/ausgabe/2018/01-02/WOMag_1-2_18_frei.pdf
ISSN:2195-5905
Parent Title (German):WOMag
Document Type:Article (peer-reviewed)
Language:German
Year of Completion:2018
Release Date:2018/03/08
Volume:7.2018
Issue:1-2
First Page:16
Last Page:21
Open-Access-Status: Closed Access 
Licence (German):License LogoUrheberrechtlich geschützt