Corner rounding of sharp silicon punching tool edges by local oxidation of silicon
Author: | Ulrich MeschederORCiDGND, Isman M. KhaziORCiDGND |
---|---|
DOI: | https://doi.org/10.1016/j.mee.2015.02.033 |
ISSN: | 0167-9317 |
Parent Title (English): | Microelectronic Engineering |
Document Type: | Article (peer-reviewed) |
Language: | English |
Year of Completion: | 2015 |
Release Date: | 2016/11/15 |
Tag: | 3D transformation; Bird’s beak; Convex and concave corner rounding; Locos; Micropunching; Silicon punch tool |
Volume: | 141.2015 |
Issue: | 2 |
First Page: | 178 |
Last Page: | 183 |
Open-Access-Status: | Closed Access |
Licence (German): | Urheberrechtlich geschützt |