• search hit 5 of 13
Back to Result List

Development of a tilt actuated micromirror for applications in laser interferometry

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Wolfgang Kronast, Ulrich MeschederORCiDGND, Bernhard Müller, Antwi Nimo, Claus Braxmaier, Thilo Schuldt
DOI:https://doi.org/10.1117/12.859648
ISBN:978-0-8194-7990-7
Parent Title (German):Proceedings of SPIE: Volume 7594; SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
Document Type:Conference Proceeding
Language:German
Year of Completion:2010
Release Date:2018/02/15
Pagenumber:10
Open Access:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG