Volltext-Downloads (blau) und Frontdoor-Views (grau)
  • search hit 3 of 15
Back to Result List

Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems

Export metadata

Additional Services

Search Google Scholar

Statistics

frontdoor_oas
Metadaten
Author:Ulrich MeschederORCiDGND, P. Urbanovic, Bernhard Müller, Safi Baborie
Parent Title (English):Proceedings of PowerMEMS 2008 + microEMS2008, Sendai, Japan, November 9-12, (2008)
Document Type:Conference Proceeding
Language:English
Year of Completion:2008
Release Date:2018/02/19
Tag:Charge decay; Ion implantation; SiO2 film electrets; Vibration energy harvesting
Page Number:4
First Page:501
Last Page:504
Licence (German):License LogoUrheberrechtlich geschützt