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Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems

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Metadaten
Author:Ulrich MeschederORCiDGND, Bernhard Müller, Safi Baborie, P. Urbanovic
DOI:https://doi.org/10.1088/0960-1317/19/9/094003
ISSN:1361-6439
Parent Title (English):Journal of Micromechanics and Microengineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2009
Release Date:2018/02/01
Volume:19.2009
Issue:9
Pagenumber:6
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG