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3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls

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Metadaten
Author:Antwi Nimo, Ulrich MeschederORCiDGND, Bernhard Müller, Awad S. Abou Elkeir
DOI:https://doi.org/10.1117/12.886876
ISBN:978-0-8194-8655-4
Parent Title (English):Proceedings of SPIE: Volume 8066; Smart Sensors, Actuators, and MEMS V, 18-20 April 2011, Prague, Czech Republic
Document Type:Conference Proceeding
Language:English
Year of Completion:2011
Release Date:2018/01/29
Pagenumber:14
Open Access:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG