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Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems

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Author:Ulrich MeschederORCiDGND, P. Urbanovic, Bernhard Müller, Safi Baborie
Parent Title (English):Proceedings of PowerMEMS 2008 + microEMS2008, Sendai, Japan, November 9-12, (2008)
Document Type:Conference Proceeding
Year of Completion:2008
Release Date:2018/02/19
Tag:Charge decay; Ion implantation; SiO2 film electrets; Vibration energy harvesting
First Page:501
Last Page:504
Open Access:Frei verfügbar
Licence (German):License LogoCreative Commons - Namensnennung-Keine Bearbeitung