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Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology

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Author:Wolfgang Kronast, Ulrich MeschederORCiDGND, Bernhard Müller, Rolf Huster
Parent Title (English):Proceedings of SPIE: Volume 8616; MOEMS and Miniaturized Systems XII, 2-6 Februar 2013, San Francisco, California, United States
Document Type:Conference Proceeding
Year of Completion:2013
Release Date:2018/01/25
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG