Evaluation and Optimization of a MOEMS Active Focusing Device
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| Author: | Ulrich MeschederORCiDGND, Michael Lootze, Khaled Aljasem |
|---|---|
| DOI: | https://doi.org/10.3390/mi12020172 |
| ISSN: | 2072-666X |
| Parent Title (English): | Micromachines |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2021 |
| Release Date: | 2021/04/07 |
| Tag: | Active focusing; Adaptive optics; Electrostatic actuation; MOEMS; SOI |
| Volume: | 12.2021 |
| Issue: | 2 |
| Article Number: | 172 |
| Page Number: | 22 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |