Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process
| Author: | Alexey Ivanov, Ulrich MeschederORCiDGND, Peter Woias |
|---|---|
| URL: | http://ma.ecsdl.org/content/MA2013-02/42/2463.full.pdf+html |
| ISSN: | 1938-6737 |
| Parent Title (English): | ECS Transactions |
| Document Type: | Contribution to a Periodical |
| Language: | English |
| Year of Completion: | 2014 |
| Release Date: | 2018/01/23 |
| Volume: | 58.2014 |
| Issue: | 46 |
| First Page: | 15 |
| Last Page: | 24 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |