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MOEMS focusing device with ideal parabolic deflection shape

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Author:Ulrich MeschederORCiDGND, Carlos Estan, Gergoe Somogyi, Markus Freudenreich
Parent Title (English):Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers
Document Type:Conference Proceeding
Year of Completion:2005
Release Date:2018/02/22
Tag:Electrostatic focusing device; FEM simulation; MOEMS; SOI
First Page:1000
Last Page:1005
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG