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Process Development For 3D Laser Lithography

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Metadaten
Author:Nigol Kaste, Alexander FilbertGND, Ulrich MeschederORCiDGND, Toomas Rang, Galina Rang
URN:https://urn:nbn:de:bsz:fn1-opus4-10047
DOI:https://doi.org/10.2495/HPSM140131
ISSN:1743-3509
Parent Title (English):WIT Transactions on The Built Environment
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2014
Release Date:2016/11/15
Tag:3D photolithography; Direct laser writing; Greyscale; MEMS; Medical application; Tactile sensor
Volume:137.2014
First Page:139
Last Page:150
Open-Access-Status: Open Access 
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International