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Porous silicon as multifunctional material in MEMS

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Author:Ulrich MeschederORCiDGND, Andras Kovacs, Wolfgang Kronast, Istvan Barsony, Maria Adam, Cs. Dücsö
Parent Title (English):Proceedings of the 2001 1st IEEE Conference on Nanotechnology : IEEE-NANO 2001 : October 28-30, 2001, Maui, Hawaii
Document Type:Conference Proceeding
Year of Completion:2001
Release Date:2018/02/27
Tag:MEMS; Micromachining; Microsystems; Porous silicon
First Page:483
Last Page:488
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG