Plasma Enhanced Atomic Layer Deposition of Iridium Oxide for Application in Miniaturized Neural Implants
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| Author: | Nicolai Simon, Maria Asplund, Thomas Stieglitz, Volker BucherORCiDGND |
|---|---|
| URN: | https://urn:nbn:de:bsz:fn1-opus4-78265 |
| DOI: | https://doi.org/10.1515/cdbme-2021-2137 |
| ISSN: | 2364-5504 |
| Parent Title (English): | Current Directions in Biomedical Engineering |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2021 |
| Release Date: | 2021/12/17 |
| Tag: | Implants; Iridium oxide; PE-ALD; Thin film coating |
| Volume: | 7.2021 |
| Issue: | 2 |
| First Page: | 539 |
| Last Page: | 542 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |