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Porous silicon based antireflection coating for the MWIR range

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Author:Shervin KeshavarziORCiD, Andras Kovacs, Ulrich MeschederORCiDGND
Parent Title (German):MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin
Publisher:VDE Verlag
Place of publication:Berlin
Document Type:Conference Proceeding
Year of Completion:2019
Release Date:2019/12/12
First Page:487
Last Page:490
Licence (German):License LogoEs gilt das UrhG