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Nasschemisches Ätzen von nahezu beliebigen 3D-Strukturen in Silizium

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Metadaten
Author:Alexey Ivanov, Andras Kovacs, Ulrich MeschederORCiDGND
ISBN:978-3-8007-3216-6
Parent Title (German):63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany
Publisher:VDE-Verlag
Place of publication:Berlin
Document Type:Conference Proceeding
Language:German
Year of Completion:2010
Release Date:2018/02/15
Tag:CD-ROM
Pagenumber:4
Open Access:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG