Investigation of plastic electrode tools for electrochemical machining of silicon
| Author: | Victor V. Lyubimov, Vladimir M. Volgin, Ulrich MeschederORCiDGND, Inna V. Gnidina, Alexey Ivanov |
|---|---|
| DOI: | https://doi.org/10.1016/j.precisioneng.2016.09.017 |
| ISSN: | 1873-2372 |
| Parent Title (English): | Precision Engineering |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2016 |
| Release Date: | 2017/04/26 |
| Tag: | Metal coating; Micro electrochemical machining; Plastic electrode-tool; Silicon |
| Volume: | 47.2016 |
| First Page: | 546 |
| Last Page: | 556 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |