• search hit 9 of 28
Back to Result List

Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Alexey Ivanov, Andras Kovacs, Ulrich MeschederORCiDGND, S. Kuhn, M. Kübler, A. Burr
ISBN:978-3-8007-3183-1
Parent Title (English):MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany
Publisher:VDE-Verlag
Place of publication:Berlin
Document Type:Conference Proceeding
Language:English
Year of Completion:2009
Release Date:2018/02/19
Tag:CD-ROM
Pagenumber:4
Open Access:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG