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Nanoporous Silicon: Multifunctional Material for Microsystems

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Author:Ulrich MeschederORCiDGND
Parent Title (English):Novel vehicle concepts and emerging vehicle technologies : papers presented at the RTO Applied Vehicle Technology Panel (AVT) symposium held in Brussels, Belgium, 7 - 10 April 2003
Document Type:Conference Proceeding
Year of Completion:2004
Release Date:2018/03/01
Licence (German):License LogoEs gilt das UrhG