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Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements

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Metadaten
Author:Alexey Ivanov, Andras Kovacs, Ulrich MeschederORCiDGND, S. Kuhn, M. Kübler, A. Burr
ISBN:978-3-8007-3183-1
Parent Title (English):MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany
Publisher:VDE-Verlag
Place of publication:Berlin
Document Type:Conference Proceeding
Language:English
Year of Completion:2009
Release Date:2018/02/19
Tag:CD-ROM
Pagenumber:4
Licence (German):License LogoEs gilt das UrhG