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Galvanisch aus 3D-Fotolack-Strukturen abgeformte metallische 3D-Freiformen

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Author:Frederico Lima, Alok Tungal, Isman KhaziORCiD, Ulrich MeschederORCiDGND
Parent Title (German):MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München
Publisher:VDE Verlag
Place of publication:Berlin
Document Type:Conference Proceeding
Year of Completion:2017
Release Date:2018/01/09
First Page:375
Last Page:378
Open Access:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG