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Nanostrukturierte Siliziumoberflächen für Mikro-Nano-Integration

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Metadaten
Author:Ulrich MeschederORCiDGND, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo
ISBN:978-3-8007-3183-1
Parent Title (German):MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany
Document Type:Conference Proceeding
Language:German
Year of Completion:2009
Release Date:2018/02/15
Tag:CD-ROM
Pagenumber:4
Open Access:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG