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Electrical properties of light-addressed sub-μm electrodes fabricated by use of nanostencil technology

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Author:Volker Bucher, Jürgen Brugger, Dieter Kern, Gyu M. Kim, Markus Schubert, Wilfried Nisch
DOI:https://doi.org/10.1016/S0167-9317(02)00422-7
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2002
Release Date:2017/06/28
Tag:Light-addressing; Nanostencil; Shadow mask; Sub-mm electrode chip
Volume:61/62.2002
Issue:July
First Page:971
Last Page:980
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG