Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching
| Author: | Alexey Ivanov, Ulrich MeschederORCiDGND, Peter Woias, Michael Kröner |
|---|---|
| Parent Title (German): | Forschungsbericht |
| Document Type: | Report |
| Identifier: | Im Katalog der Hochschule Furtwangen ansehen |
| Language: | English |
| Year of Completion: | 2009 |
| Release Date: | 2018/09/25 |
| First Page: | 34 |
| Last Page: | 38 |
| Forschungsbericht: | Forschungsbericht 2008/2009 |
| Licence (German): |  Urheberrechtlich geschützt |