The search result changed since you submitted your search request. Documents might be displayed in a different sort order.
  • search hit 70 of 105
Back to Result List

Verfahren und Vorrichtung zur photoinduzierten Kontrolle des anisotropen Ätzens von kristallinem Silizium

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Ulrich MeschederORCiDGND, Christiane Kötter
URL:https://depatisnet.dpma.de/DepatisNet/depatisnet?action=bibdat&docid=DE000019811965A1
Document Type:Other
Language:German
Year of Completion:1998
Release Date:2018/09/06
Tag:Patent
Open Access:Frei verfügbar
Patent Number:DE000019811965A1
Country of Patent Application:Deutschland
Patent Application Year:1998
Patent Application:19.03.1998
Licence (German):License LogoEs gilt das UrhG