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Verfahren und Vorrichtung zur photoinduzierten Kontrolle des anisotropen Ätzens von kristallinem Silizium

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Metadaten
Author:Ulrich MeschederORCiDGND, Christiane Kötter
URL:https://depatisnet.dpma.de/DepatisNet/depatisnet?action=bibdat&docid=DE000019811965A1
Document Type:Other
Language:German
Year of Completion:1998
Release Date:2018/09/06
Tag:Patent
Open-Access-Status: Open Access 
Patent Number:DE000019811965A1
Country of Patent Application:Deutschland
Patent Application Year:1998
Patent Application:19.03.1998
Licence (German):License LogoUrheberrechtlich geschützt