Volltext-Downloads (blau) und Frontdoor-Views (grau)
  • search hit 7 of 16
Back to Result List

Porous silicon as multifunctional material in MEMS

Export metadata

Additional Services

Search Google Scholar

Statistics

frontdoor_oas
Metadaten
Author:Ulrich MeschederORCiDGND, Andras KovacsORCiDGND, Wolfgang Kronast, Istvan Barsony, Maria Adam, Cs. Dücsö
DOI:https://doi.org/10.1109/NANO.2001.966471
ISBN:0-7803-7215-8
Parent Title (English):Proceedings of the 2001 1st IEEE Conference on Nanotechnology : IEEE-NANO 2001 : October 28-30, 2001, Maui, Hawaii
Document Type:Conference Proceeding
Language:English
Year of Completion:2001
Release Date:2018/02/27
Tag:MEMS; Micromachining; Microsystems; Porous silicon
First Page:483
Last Page:488
Open-Access-Status: Closed Access 
Licence (German):License LogoUrheberrechtlich geschützt