Volltext-Downloads (blau) und Frontdoor-Views (grau)
The search result changed since you submitted your search request. Documents might be displayed in a different sort order.
  • search hit 3 of 288
Back to Result List

Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices

Export metadata

Additional Services

Search Google Scholar

Statistics

frontdoor_oas
Metadaten
Author:Alexey Ivanov, Ulrich MeschederORCiDGND
ISBN:978-1-4822-6458-6
Parent Title (English):Porous Silicon: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three
Publisher:CRC Press
Place of publication:Boca Raton
Editor:Ghenadii Korotcenkov
Document Type:Part of a Book
Identifier:Im Katalog der Hochschule Furtwangen ansehen
Language:English
Year of Completion:2016
Release Date:2017/01/24
Tag:Energy; Microelectronics; Optoelectronics
First Page:129
Last Page:141
Licence (German):License LogoUrheberrechtlich geschützt